Semiconductor Processing and Device Design

Description: Lecture, two hours; laboratory, four hours; outside study, six hours. Enforced requisites: courses 121B, 121DA. Design fabrication and characterization of p-n junction and transistors. Students perform various processing tasks such as wafer preparation, oxidation, diffusion, metallization, and photolithography. Introduction to CAD tools used in integrated circuit processing and device design. Device structure optimization tool based on MEDICI; process integration tool based on SUPREM. Course familiarizes students with those tools. Using CAD tools, CMOS process integration to be designed. Letter grading.

Units: 4.0
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