EC ENGR 222

Integrated Circuits Fabrication Processes

Description: Lecture, four hours; discussion, one hour; outside study, seven hours. Requisite: course 2. Principles of integrated circuits fabrication processes. Technological limitations of integrated circuits design. Topics include bulk crystal and epitaxial growth, thermal oxidation, diffusion, ion-implantation, chemical vapor deposition, dry etching, lithography, and metallization. Introduction of advanced process simulation tools. Letter grading.

Units: 4.0
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Goutham Ezhilarasu

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Subramanian Iyer

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Chi On

Overall Rating 3.7
Easiness 1.5/ 5
Clarity 3.3/ 5
Workload 1.7/ 5
Helpfulness 3.3/ 5
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Great professor, very nice person, very difficult assignments. That's all. :)
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