EL ENGR 121DA

Semiconductor Processing and Device Design

Description: (Formerly numbered 121L.) Lecture, four hours; laboratory, four hours; outside study, four hours. Enforced requisite or corequisite: course 121B. Design fabrication and characterization of p-n junction and transistors. Students perform various processing tasks such as wafer preparation, oxidation, diffusion, metallization, and photolithography. Introduction to CAD tools used in integrated circuit processing and device design. Device structure optimization tool based on MEDICI; process integration tool based on SUPREM. Course familiarizes students with those tools. Using CAD tools, CMOS process integration to be designed. In progress grading (credit to be given only on completion of course 121DB).

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