Description: (Same as Bioengineering CM250A and Electrical Engineering CM250A.) Lecture, four hours; discussion, one hour; outside study, seven hours. Requisites: Chemistry 20A, 20L, Physics 1A, 1B, 1C, 4AL, 4BL. Introduction to micromachining technologies and microelectromechanical systems (MEMS). Methods of micromachining and how these methods can be used to produce variety of MEMS, including microstructures, microsensors, and microactuators. Students design microfabrication processes capable of achieving desired MEMS device. Concurrently scheduled with course CM180. Letter grading.

Units: 4.0